From: Subject: Mass-Transfer Characterization of a Propeller Plating Cell for Microelectromechanical Systems Date: Mon, 31 Mar 2008 16:46:39 +0200 MIME-Version: 1.0 Content-Type: multipart/related; type="text/html"; boundary="----=_NextPart_000_00D2_01C8934E.CA559E40" X-MimeOLE: Produced By Microsoft MimeOLE V6.00.2900.3198 This is a multi-part message in MIME format. ------=_NextPart_000_00D2_01C8934E.CA559E40 Content-Type: text/html; charset="utf-8" Content-Transfer-Encoding: quoted-printable Content-Location: http://www.ecsdl.org/getabs/servlet/GetabsServlet?prog=normal&id=JESOAN00015300001100C755000001&idtype=cvips&gifs=Yes =EF=BB=BF Mass-Transfer Characterization of a Propeller = Plating Cell for Microelectromechanical Systems

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Mass-Transfer Characterization = of a=20 Propeller Plating Cell for Microelectromechanical = Systems

J. Electrochem. Soc., Volume 153, = Issue 11,=20 pp. C755-C760 (2006)

L.=20 Philippe, P.=20 Kern, and J.=20 Michler

Swiss Federal Laboratories = for=20 Materials Testing and Research, Thun 3602, = Switzerland

(Revised 20 June 2006; = published 8=20 September 2006)

A hydrodynamic method = based on a=20 three-blades rotating propeller in a = horizontal=20 plating cell was studied. Linear sweep voltammetry in = a=20 dilute copper solution is used to measure the = limiting=20 current. Mass-transfer correlation shows = that the=20 system yields steady-state flow that is in=20 excellent agreement with the existing model developed = by=20 Levich for a rotating disk electrode, suggesting = that=20 the laminar flow established in the cell is = analogous to that seen at the rotating = disk.=20 Chronoamperometry and deposition under limiting = current=20 conditions show that the mass-transfer diffusion = layer=20 is uniform in temporal and spatial = terms.

=C2=A92006 The = Electrochemical=20 Society

doi:10.1149/1.2344836=20
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2px; BORDER-BOTTOM: = #666666 1px dotted; FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, = Geneva, sans-serif; TEXT-DECORATION: underline } .BodyEnd:hover { PADDING-RIGHT: 2px; PADDING-LEFT: 2px; FONT-SIZE: 11px; PADDING-BOTTOM: = 2px; COLOR: #333333; LINE-HEIGHT: 11px; PADDING-TOP: 2px; BORDER-BOTTOM: = #666666 1px dotted; FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, = Geneva, sans-serif; TEXT-DECORATION: none } Body2 { FONT-SIZE: 11px; COLOR: #333333; LINE-HEIGHT: 15px; FONT-STYLE: normal; = FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; TEXT-DECORATION: none } A.Body2:link { FONT-SIZE: 11px; COLOR: #660000; LINE-HEIGHT: 15px; FONT-STYLE: normal; = FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; TEXT-DECORATION: = underline } A.Body2:visited { FONT-SIZE: 11px; COLOR: #993333; LINE-HEIGHT: 15px; FONT-STYLE: normal; = FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; TEXT-DECORATION: = underline } A.Body2:hover { FONT-SIZE: 11px; COLOR: #ff3333; LINE-HEIGHT: 15px; FONT-STYLE: normal; = FONT-FAMILY: Verdana, Arial, Geneva, sans-serif } .Body3bkgrnd { PADDING-RIGHT: 6px; PADDING-LEFT: 6px; FONT-SIZE: 11px; PADDING-BOTTOM: = 6px; COLOR: #333333; LINE-HEIGHT: 15px; PADDING-TOP: 6px; FONT-STYLE: = normal; FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; = TEXT-DECORATION: none } A.Body3bkgrnd :link { PADDING-RIGHT: 6px; PADDING-LEFT: 6px; FONT-SIZE: 11px; PADDING-BOTTOM: = 6px; COLOR: #660000; LINE-HEIGHT: 15px; PADDING-TOP: 6px; FONT-STYLE: = normal; FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; = TEXT-DECORATION: underline } A.Body3bkgrnd :visited { PADDING-RIGHT: 6px; PADDING-LEFT: 6px; FONT-SIZE: 11px; PADDING-BOTTOM: = 6px; COLOR: #993333; LINE-HEIGHT: 15px; PADDING-TOP: 6px; FONT-STYLE: = normal; FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; = TEXT-DECORATION: underline } A.Body3bkgrnd :hover { PADDING-RIGHT: 6px; PADDING-LEFT: 6px; FONT-SIZE: 11px; PADDING-BOTTOM: = 6px; COLOR: #ff3333; LINE-HEIGHT: 15px; PADDING-TOP: 6px; FONT-STYLE: = normal; FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; = TEXT-DECORATION: none } .DottedLineSeparator { PADDING-RIGHT: 2px; PADDING-LEFT: 2px; FONT-SIZE: 11px; PADDING-BOTTOM: = 2px; COLOR: #333333; LINE-HEIGHT: 11px; PADDING-TOP: 2px; BORDER-BOTTOM: = #666666 1px dotted; FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, = Geneva, sans-serif; TEXT-DECORATION: none } .DottedLineSeparator:link { PADDING-RIGHT: 2px; PADDING-LEFT: 2px; FONT-SIZE: 11px; PADDING-BOTTOM: = 2px; COLOR: #333333; LINE-HEIGHT: 11px; PADDING-TOP: 2px; BORDER-BOTTOM: = #666666 1px dotted; FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, = Geneva, sans-serif; TEXT-DECORATION: underline } .DottedLineSeparator:visited { PADDING-RIGHT: 2px; PADDING-LEFT: 2px; FONT-SIZE: 11px; PADDING-BOTTOM: = 2px; COLOR: #333333; LINE-HEIGHT: 11px; PADDING-TOP: 2px; BORDER-BOTTOM: = #666666 1px dotted; FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, = Geneva, sans-serif; TEXT-DECORATION: underline } .DottedLineSeparator:hover { PADDING-RIGHT: 2px; PADDING-LEFT: 2px; FONT-SIZE: 11px; PADDING-BOTTOM: = 2px; COLOR: #333333; LINE-HEIGHT: 11px; PADDING-TOP: 2px; BORDER-BOTTOM: = #666666 1px dotted; FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, = Geneva, sans-serif; TEXT-DECORATION: none } .listlinks { PADDING-RIGHT: 6px; PADDING-LEFT: 6px; FONT-SIZE: 10px; PADDING-BOTTOM: = 6px; COLOR: #333333; LINE-HEIGHT: 11px; PADDING-TOP: 6px; FONT-STYLE: = normal; FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; = TEXT-DECORATION: none } A.listlinks:link { PADDING-RIGHT: 6px; PADDING-LEFT: 6px; FONT-SIZE: 10px; PADDING-BOTTOM: = 6px; COLOR: #660000; LINE-HEIGHT: 11px; PADDING-TOP: 6px; FONT-STYLE: = normal; FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; = TEXT-DECORATION: underline } A.listlinks:visited { PADDING-RIGHT: 6px; PADDING-LEFT: 6px; FONT-SIZE: 10px; PADDING-BOTTOM: = 6px; COLOR: #660000; LINE-HEIGHT: 11px; PADDING-TOP: 6px; FONT-STYLE: = normal; FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; = TEXT-DECORATION: underline } A.listlinks:hover { PADDING-RIGHT: 6px; PADDING-LEFT: 6px; FONT-SIZE: 10px; PADDING-BOTTOM: = 6px; COLOR: #660000; LINE-HEIGHT: 11px; PADDING-TOP: 6px; FONT-STYLE: = normal; FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; = TEXT-DECORATION: none } .leftlinks { PADDING-RIGHT: 10px; PADDING-LEFT: 10px; FONT-SIZE: 9px; = PADDING-BOTTOM: 10px; COLOR: #660000; LINE-HEIGHT: 11px; PADDING-TOP: = 10px; FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, Geneva, = sans-serif; TEXT-DECORATION: none } A.leftlinks:link { PADDING-RIGHT: 10px; PADDING-LEFT: 10px; FONT-SIZE: 9px; = PADDING-BOTTOM: 10px; COLOR: #660000; LINE-HEIGHT: 11px; PADDING-TOP: = 10px; FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, Geneva, = sans-serif; TEXT-DECORATION: none } A.leftlinks:visited { PADDING-RIGHT: 10px; PADDING-LEFT: 10px; FONT-SIZE: 9px; = PADDING-BOTTOM: 10px; COLOR: #660000; LINE-HEIGHT: 11px; PADDING-TOP: = 10px; FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, Geneva, = sans-serif; TEXT-DECORATION: none } A.leftlinks:hover { PADDING-RIGHT: 10px; PADDING-LEFT: 10px; FONT-SIZE: 9px; = PADDING-BOTTOM: 10px; COLOR: #660000; LINE-HEIGHT: 11px; PADDING-TOP: = 10px; FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, Geneva, = sans-serif; TEXT-DECORATION: none } .Subnav { PADDING-RIGHT: 6px; PADDING-LEFT: 6px; FONT-WEIGHT: 400; FONT-SIZE: = 9px; PADDING-BOTTOM: 6px; COLOR: #333333; LINE-HEIGHT: 10px; = PADDING-TOP: 6px; FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, = Geneva, sans-serif; TEXT-DECORATION: none } A.Subnav:link { PADDING-RIGHT: 6px; PADDING-LEFT: 6px; PADDING-BOTTOM: 6px; COLOR: = #660000; PADDING-TOP: 6px; TEXT-DECORATION: none } A.Subnav:visited { PADDING-RIGHT: 6px; PADDING-LEFT: 6px; PADDING-BOTTOM: 6px; COLOR: = #993333; PADDING-TOP: 6px; TEXT-DECORATION: none } A.Subnav:hover { PADDING-RIGHT: 6px; PADDING-LEFT: 6px; PADDING-BOTTOM: 6px; COLOR: = #660000; PADDING-TOP: 6px; TEXT-DECORATION: none } .textsearch { FONT-SIZE: 8pt; WIDTH: 165px; FONT-FAMILY: arial; HEIGHT: 9px } .form { PADDING-RIGHT: 0px; PADDING-LEFT: 0px; FONT-SIZE: 9px; PADDING-BOTTOM: = 0px; WIDTH: 90px; PADDING-TOP: 0px; FONT-FAMILY: arial; HEIGHT: 10px } .input_box { BORDER-RIGHT: #ff9900 1px solid; BORDER-TOP: #ff9900 1px solid; = BACKGROUND: #cccccc; BORDER-LEFT: #ff9900 1px solid; COLOR: #333333; = BORDER-BOTTOM: #ff9900 1px solid } .submit-button { BORDER-RIGHT: #ff9900 1px outset; BORDER-TOP: #ff9900 1px outset; = BORDER-LEFT: #ff9900 1px outset; BORDER-BOTTOM: #ff9900 1px outset } .KOhead { PADDING-RIGHT: 3px; PADDING-LEFT: 3px; FONT-WEIGHT: bold; FONT-SIZE: = 18px; BACKGROUND: #999999; PADDING-BOTTOM: 3px; COLOR: #ffffff; = LINE-HEIGHT: 18px; PADDING-TOP: 3px; FONT-FAMILY: Arial, Geneva, = sans-serif; TEXT-ALIGN: center; TEXT-DECORATION: none } A.KOhead:link { TEXT-DECORATION: underline } A.KOhead:visited { TEXT-DECORATION: underline } A.KOhead:hover { TEXT-DECORATION: none } .KOhead2 { PADDING-RIGHT: 3px; PADDING-LEFT: 3px; FONT-WEIGHT: bold; FONT-SIZE: = 14px; BACKGROUND: #999999; PADDING-BOTTOM: 3px; COLOR: #ffffff; = LINE-HEIGHT: 15px; PADDING-TOP: 3px; FONT-FAMILY: Arial, Geneva, = sans-serif; TEXT-ALIGN: center; TEXT-DECORATION: none } A.KOhead2:link { TEXT-DECORATION: underline } A.KOhead2:visited { TEXT-DECORATION: underline } A.KOhead2:hover { TEXT-DECORATION: none } .header { PADDING-RIGHT: 0px; PADDING-LEFT: 0px; FONT-WEIGHT: bold; FONT-SIZE: = 10px; PADDING-BOTTOM: 0px; COLOR: #ffffff; LINE-HEIGHT: 10px; = PADDING-TOP: 0px; FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; = TEXT-DECORATION: none } A.header:link { FONT-WEIGHT: bold; FONT-SIZE: 10px; COLOR: #ffffff; LINE-HEIGHT: 10px; = FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; TEXT-DECORATION: = underline } A.header:visited { FONT-WEIGHT: bold; FONT-SIZE: 9px; COLOR: #ffffff; LINE-HEIGHT: 10px; = FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; TEXT-DECORATION: = underline } A.header:hover { FONT-WEIGHT: bold; FONT-SIZE: 10px; COLOR: #ffffff; LINE-HEIGHT: 10px; = FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; TEXT-DECORATION: none } .footer { FONT-SIZE: 10px; COLOR: #660000; LINE-HEIGHT: 13px; FONT-FAMILY: = Verdana, Arial, Geneva, sans-serif; TEXT-DECORATION: none } A.footer:link { FONT-SIZE: 10px; LINE-HEIGHT: 13px; FONT-FAMILY: Verdana, Arial, = Geneva, sans-serif; TEXT-DECORATION: underline } A.footer:visited { FONT-SIZE: 10px; LINE-HEIGHT: 13px; FONT-FAMILY: Verdana, Arial, = Geneva, sans-serif; TEXT-DECORATION: underline } A.footer:hover { FONT-SIZE: 10px; LINE-HEIGHT: 13px; FONT-FAMILY: Verdana, Arial, = Geneva, sans-serif; TEXT-DECORATION: none } UL { LIST-STYLE: none url(../assets/graphics/arrow_transp_right.gif) inside; = PADDING-LEFT: 3px; MARGIN-LEFT: 1px } UL.horiz LI { DISPLAY: inline } .title { FONT-WEIGHT: bold; FONT-SIZE: 16px; COLOR: #660000; LINE-HEIGHT: 15px; = FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; = TEXT-DECORATION: none } .title:link { FONT-WEIGHT: bold; FONT-SIZE: 16px; COLOR: #660000; LINE-HEIGHT: 15px; = FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; = TEXT-DECORATION: underline } .title:visited { FONT-WEIGHT: bold; FONT-SIZE: 16px; COLOR: #660000; LINE-HEIGHT: 15px; = FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, Geneva, sans-serif } .title:hover { FONT-WEIGHT: bold; FONT-SIZE: 16px; COLOR: #660000; LINE-HEIGHT: 15px; = FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; = TEXT-DECORATION: none } .headline1 { FONT-WEIGHT: bold; FONT-SIZE: 18px; MARGIN-BOTTOM: -10px; COLOR: = #000000; LINE-HEIGHT: 17px; FONT-STYLE: normal; FONT-FAMILY: Verdana, = Arial, Geneva, sans-serif; TEXT-DECORATION: none } A.headline1:link { FONT-WEIGHT: bold; FONT-SIZE: 18px; MARGIN-BOTTOM: -10px; COLOR: = #000000; LINE-HEIGHT: 17px; FONT-STYLE: normal; FONT-FAMILY: Verdana, = Arial, Geneva, sans-serif; TEXT-DECORATION: underline } A.headline1:visited { FONT-WEIGHT: bold; FONT-SIZE: 18px; MARGIN-BOTTOM: -10px; COLOR: = #000000; LINE-HEIGHT: 17px; FONT-STYLE: normal; FONT-FAMILY: Verdana, = Arial, Geneva, sans-serif; TEXT-DECORATION: underline } A.headline1:hover { FONT-WEIGHT: bold; FONT-SIZE: 18px; MARGIN-BOTTOM: -10px; COLOR: = #000000; LINE-HEIGHT: 17px; FONT-STYLE: normal; FONT-FAMILY: Verdana, = Arial, Geneva, sans-serif; TEXT-DECORATION: none } A.headline2 { FONT-WEIGHT: bold; FONT-SIZE: 36px; COLOR: #333333; LINE-HEIGHT: 15px; = FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; = TEXT-DECORATION: none } A.headline2:link { FONT-WEIGHT: bold; FONT-SIZE: 16px; COLOR: #333333; LINE-HEIGHT: 15px; = FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; = TEXT-DECORATION: underline } A.headline2:visited { FONT-WEIGHT: bold; FONT-SIZE: 16px; COLOR: #333333; LINE-HEIGHT: 15px; = FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; = TEXT-DECORATION: underline } A.headline2:hover { FONT-WEIGHT: bold; FONT-SIZE: 16px; COLOR: #333333; LINE-HEIGHT: 15px; = FONT-STYLE: normal; FONT-FAMILY: Verdana, Arial, Geneva, sans-serif; = TEXT-DECORATION: none } .leftnav1 { PADDING-RIGHT: 8px; PADDING-LEFT: 8px; FONT-WEIGHT: 400; FONT-SIZE: = 10px; PADDING-BOTTOM: 8px; COLOR: #660000; LINE-HEIGHT: 14px; = PADDING-TOP: 8px; FONT-STYLE: normal; FONT-FAMILY: Verdana, Trebuchet = MS, Arial; TEXT-DECORATION: none } .boxheader { PADDING-RIGHT: 6px; PADDING-LEFT: 6px; FONT-SIZE: 12px; PADDING-BOTTOM: = 6px; COLOR: #660000; LINE-HEIGHT: 12px; PADDING-TOP: 6px; FONT-FAMILY: = Verdana, Trebuchet MS, Arial; TEXT-DECORATION: none } .box { PADDING-RIGHT: 4px; PADDING-LEFT: 4px; FONT-SIZE: 10px; PADDING-BOTTOM: = 4px; COLOR: #333333; LINE-HEIGHT: 12px; PADDING-TOP: 4px; FONT-STYLE: = normal; FONT-FAMILY: Verdana, Trebuchet MS, Arial; TEXT-DECORATION: none } .box2 { PADDING-RIGHT: 8px; PADDING-LEFT: 8px; FONT-WEIGHT: 400; FONT-SIZE: = 10px; PADDING-BOTTOM: 8px; COLOR: #333333; LINE-HEIGHT: 10px; = PADDING-TOP: 8px; FONT-STYLE: normal; FONT-FAMILY: Verdana, Trebuchet = MS, Arial; 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MM_openBrWindow(theURL,winName,features) { //v2.0=0A= window.open(theURL,winName,features);=0A= }=0A= =0A= =0A= function popUp(URL) {=0A= day =3D new Date();=0A= id =3D day.getTime();=0A= eval("page" + id + " =3D window.open(URL, '" + id + "', = 'toolbar=3D0,scrollbars=3D1,location=3D0,statusbar=3D0,menubar=3D0,resiza= ble=3D1,width=3D530,height=3D400,left =3D 650,top =3D 312');");=0A= }=0A= =0A= function openWindowCustom(baseURL,w,h) {=0A= openPopup =3D = window.open(baseURL,'open_window','width=3D'+w+',height=3D'+h+',toolbars=3D= 0,scrollbars=3D1,location=3Dno,statusbars=3D0,menubar=3D0,resize=3Dno,top= =3D50,left=3D50');=0A= openPopup.focus(); =0A= }=0A= //**********************************************//=0A= ------=_NextPart_000_00D2_01C8934E.CA559E40 Content-Type: application/octet-stream Content-Transfer-Encoding: quoted-printable Content-Location: http://www.ecsdl.org/jhtml/scitation/js/scitationGlobal.js =0A= ------=_NextPart_000_00D2_01C8934E.CA559E40--